CIP Molds for ITO Targets

CIP Molds for ITO Targets

There are four main forming methods for ITO targets

Direct air hot pressing - Direct air hot pressing method is the use of thermal energy and mechanical energy to densify ceramic materials can produce a density of 91% to 96% of the high-density ITO ceramic target process is as follows: heating mold, adding the sample, the model is fixed on the heating plate (control melting temperature and time) and then the sample melting, hardening, cooling. Finally, you can take out the finished product.

Hot isostatic pressing - hot isostatic pressing (HIP) can be considered as pressure sintering or high temperature pressing, compared with traditional non-pressure sintering, hot isostatic pressing method can be at a lower temperature (generally 0.5 to 0.7 times the melting point of the material) to make the material completely dense, it can well control the structure, inhibit grain growth and obtain a uniform, isotropic structure. The process of hot isostatic pressing to prepare the ITO target is as follows: First, the ITO solid solution powder is partially reduced in a certain reducing atmosphere (such as a mixture of H2, N2 and H2) and at a temperature of 300~500℃. The reduced powder is then pressed into preforms by molding or cold isostatic pressing, which are placed in stainless steel containers with insulation between them, which are then vacuumed and sealed. Finally, the container was placed in a hot isostatic pressing furnace at 800~1050℃ and 50~200MPa for 2~6 hours to prepare the ITO target.

Room temperature sintering - room temperature sintering is a target preparation method developed in the early 1990s, it uses prepressing method (or slurry deep injection method) to prepare high-density target prefabricated parts, and then sintering at a certain atmosphere and temperature, the main process of atmospheric sintering method is: In2O3 powder (with a certain vibration density) and SnO2 powder mixed, Slurry for slurry casting is prepared, and then it is dehydrated and defatted for a long time at a temperature of 300~500 ° C, and finally sintered at a pressure above 1 atmosphere under pure oxygen or air atmosphere, and the sintering temperature is 1450 ~ 1550 ° C.

Cold isostatic pressing - cold isostatic pressing (CIP) at room temperature with rubber or plastic as the cover mold material, liquid as the pressure medium to transfer ultra-high pressure, under the protection of low pressure oxygen atmosphere, ITO powder through cold isostatic pressing into a large ceramic prefabricated bar, and then in 0.1~0.9MPa pure oxygen environment, Sintering at a high temperature of 1500~1600℃ this method can theoretically produce a ceramic target with a density of 95%.

 Jiangsu High Industry on the research and development and production of high-performance polyurethane isostatic pressing molds. Through in-depth cooperation with many isostatic pressing equipment manufacturers and in-depth study of the industry, the developed isostatic pressing polyurethane mold series products have the characteristics of long service life, high precision, small deformation, easy demoulding, etc., and are widely used in ceramics, etc. Static pressing mould, cemented carbide isostatic pressing mould, rare earth permanent magnet material isostatic pressing mould, graphite isostatic pressing mould, etc.

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