Isostatic Pressing Molds for ITO Targets

Isostatic Pressing Molds for ITO Targets

There are four main forming methods for ITO targets

Vacuum hot pressing--vacuum hot pressing is a process that uses thermal and mechanical energy to densify ceramic materials, and can produce high-density ITO ceramic targets with a density of 91%~96%. The process is as follows: heat the mold, add samples, and mold Fix it on the heating plate (control the melting temperature and time), then melt, harden, cool the sample, and finally take out the finished product.

Hot isostatic pressing - hot isostatic pressing (HIP) can be considered as pressure sintering or high temperature pressing. Compared with traditional pressureless sintering, hot isostatic pressing can be carried out at a lower temperature (generally the melting point of the material) 0.5~0.7 times) to make the material completely dense. It can control the structure well, inhibit the grain growth and obtain a uniform and isotropic structure. The process of preparing the ITO target by hot isostatic pressing is as follows. First, the ITO The solid solution powder is partially reduced in a certain reducing atmosphere (such as a mixture of H2, N2 and H2) and a temperature of 300~500°C. Then, the reduced powder is pressed into a preform by molding or cold isostatic pressing. The preform It is placed in a stainless steel container with insulating material between them. Then the container is evacuated and sealed. Finally, the container is placed in a hot isostatic pressing furnace at 800~1050°C and 50~200MPa for 2~6 hours to prepare ITO target.

Room temperature sintering-room temperature sintering is a target preparation method developed in the early 1990s. It uses the pre-press method (or slurry casting method) to prepare high-density target preforms, and then sinters them under a certain atmosphere and temperature. Atmospheric pressure The main process of the sintering method is: mix In2O3 powder (with a certain tap density) and SnO2 powder to prepare a slurry for slurry casting. Then dehydrate and degrease at a temperature of 300~500°C for a long time , and finally sintered at a pressure above 1 atmosphere in a pure oxygen or air atmosphere, and the sintering temperature is 1450 to 1550 °C.

Cold isostatic pressing - cold isostatic pressing (CIP) uses rubber or plastic as the covering mold material at room temperature, and uses liquid as the pressure medium to transmit ultra-high pressure. Under the protection of low-pressure oxygen atmosphere, the ITO powder is passed through the cold isostatic Compressed into a large ceramic preform, and then sintered at a high temperature of 1500-1600°C in a pure oxygen environment of 0.1-0.9 MPa. This method can theoretically produce a ceramic target with a density of 95%.

ITO Target Preparation Method--Cold Isostatic Pressing

The advantages of cold isostatic pressing to prepare ITO targets are:

(1) Compared with mechanical pressing, due to the high pressure of cold isostatic pressing, the workpiece is evenly stressed, and it is especially suitable for pressing large-sized powder products.

(2) Pressed powder products have the advantages of high density and uniformity.

(3) Compressed powder does not need to add lubricants, etc.

(4) Low production cost, suitable for mass production. However, the use of hyperbaric oxygen makes the procedure dangerous.

    Jiangsu High Industry on the research and development and production of high-performance polyurethane isostatic pressing molds.

Through in-depth cooperation with many isostatic pressing equipment manufacturers and in-depth study of the industry, the developed isostatic pressing polyurethane mold series products have the characteristics of long service life, high precision, small deformation, easy demoulding, etc., and are widely used in ceramics, etc. Static pressing mould, cemented carbide isostatic pressing mould, rare earth permanent magnet material isostatic pressing mould, graphite isostatic pressing mould, etc.

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