The Methods of ITO Targets Molding

The Methods of ITO Targets Molding 

1.spraying method

Spraying method is the use of high-pressure gas (N2, H2, mixed gas or air) to carry powder particles through the scaling tube to produce supersonic biphasic flow, in the intact solid state hit the substrate, through the larger plastic flow deformation deposited on the surface of the bound backing plate and the formation of the coating, coating thickening layer by layer, to obtain ceramic target material.

In recent years, from the basic spraying method and derived from plasma spraying, arc spraying, supersonic flame spraying, cold spraying and other spray forming technology. With spray molding process in the high ITO, AZO, IGZO target molding has been a major breakthrough, Guangzhou, Shenzhen and other large target manufacturers have successfully prepared high-performance targets.

2. cold isostatic pressing method

Cold isostatic pressing method is to put the pre-formed billet into the rubber sleeve and immerse it in high pressure liquid to make it under isotropic pressure to achieve the reinforcement of billet density. Cold isostatic pressing only obtains the highest possible density of the billet, making it easier to sinter and densify the billet. Since cold isostatic pressing does not have the sintering capability of hot isostatic pressing, a standing sintering process is required to sinter the billets.

Cold isostatic pressing is capable of pressing large size targets and is the preferred molding method for most companies today. Internal and external molding studies have shown that cold isostatic pressing can produce high quality billets to meet the needs of ceramic targets. However, cold isostatic pressing for forming oversized billets can lead to very expensive equipment investment due to the limitation of chamber size, and there are deformation problems when the billets are thin and large in size. At the same time, when pressing different sizes of billets, different sizes of pre-pressing molds need to be prepared, and the mold cost is high.

3. Hot isostatic pressing method

It is to put the powder or pre-pressed billets into the sleeve, and then vacuum welded and sealed inside the sleeve, and put it into the high pressure container, so that the powder is sintered under high temperature and isotropic pressure, and the forming and sintering are carried out at the same time.

In the development of ITO target material, the early use of hot isostatic pressure technology is difficult to obtain high density, large size material. With the emergence of atmospheric pressure sintering method, hot isostatic method of preparation of the target size is small, low density, high oxygen loss rate and the method of expensive equipment, high cost shortcomings, so hot isostatic method in the preparation of ITO ceramic target no longer has a competitive advantage, the subsequent research and industrialization is gradually diluted by the industry, but still more suitable for the need of oxygen-deficient ceramic targets .

4. wet molding

Wet forming is to prepare the oxide powder into a slurry, and then realize the plain blank of fixed shape by self-solidification, water absorption or pressure filtration, etc., and obtain a high density plain blank after drying. Wet forming not only can realize the function of cold isostatic forming, but also can make up for the shortage of cold isostatic forming. Wet forming of ceramic target materials includes slurry forming, gel forming, direct solidification forming, etc.

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