The Methods of Forming ITO Target

At present, the main forming methods of ITO targets are as follows:

1. The hot isostatic pressing method is to put the powder or pre-pressed green body into the package, then vacuum the inside of the package and seal it, and put it into a high-pressure container, so that the powder is sintered under high temperature and equal pressure to form. Simultaneously with sintering. In the development of ITO targets, it is difficult to obtain high-density, large-sized materials with the hot isostatic pressing technology adopted in the early stage. With the advent of the atmospheric pressure sintering method, the target prepared by the hot isostatic pressing method has the disadvantages of small size, low density, high oxygen loss rate, expensive equipment and high cost. The preparation of ITO ceramic targets no longer has a competitive advantage, and subsequent research and industrialization are gradually diluted by the industry, but it is still more suitable for ceramic targets that require oxygen deficiency.

2. The cold isostatic pressing method is to put the pre-formed green body into a rubber sheath and immerse it in a high-pressure liquid so that it can withstand isotropic pressure to realize the enhancement of the green body density. Cold isostatic pressing is only to obtain a green body with the highest possible density, which makes the sintering and densification of the green body easier. Since cold isostatic pressing does not have the sintering ability of hot isostatic pressing, an independent sintering process is required to sinter the green body. Cold isostatic pressing can suppress large-sized targets, and is currently the preferred molding method for most companies. Forming studies at home and abroad have shown that cold isostatic pressing can produce high-quality green bodies that meet the needs of ceramic targets. However, when cold isostatic pressing is used to form super-sized green bodies, the equipment investment is very expensive due to the limitation of the chamber size, and there is a deformation problem when the green bodies are thin and large in size. At the same time, when pressing green bodies of different sizes, it is necessary to prepare pre-pressing molds of different specifications, and the cost of the molds is relatively high.

3. The spraying method is to use high-pressure gas (N2, H2, mixed gas or air) to carry powder particles through a scaling tube to generate a supersonic two-phase flow, hit the substrate in a completely solid state, and deposit on the binding back through a large plastic flow deformation. A coating is formed on the surface of the plate, and the coating is thickened layer by layer to obtain a ceramic target. From the basic spraying method, spraying forming technologies such as plasma spraying, arc spraying, supersonic flame spraying and cold spraying are derived. Using niobium oxide powder and a small amount of metal Nb, the industrialized preparation of rotary niobium oxide ceramic target was realized by plasma spraying. In recent years, there have been great breakthroughs in the forming of high-end ITO, AZO and IGZO targets by spray forming, and large target manufacturers have successfully produced high-performance targets.

Isostatic Pressing/Cold Isostatic Pressing Bags/Molds/Toolings

    Jiangsu High Tech Co., Ltd. is located in Zhenjiang, Jiangsu. It is a high-tech enterprise that develops and produces high-performance polyurethane products, cold isostatic pressing molds and cold isostatic pressing machines. The company's main products are polyurethane isostatic pressing molds and cold isostatic pressing machines. The company's products are widely used in all walks of life in China and exported to more than 30 regions around the world. They are widely praised by customers for their excellent quality and good service. The company always adheres to the product concept of "quality first" and has a deep understanding of customer needs. The company has been committed to the research and development and production of high-performance polyurethane elastomer molds for many years, and solves various design and production problems of polyurethane elastic molds for isostatic pressing users. The company has mature production and processing technology and a complete set of experimental equipment for mold elastomer analysis. In order to ensure the excellent impact resistance, abrasion resistance, cutting, tear resistance and clarity of the product and excellent dimensional stability. Its products are widely used in magnetic materials, ceramics, cemented carbide, high temperature refractory materials, rare earth permanent magnets, carbon materials, rare metal powders and other industries.

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